Electrolytic Manganese Dioxide Coatings on High Aspect Ratio Micro-Pillar Arrays for 3D Thin Film Lithium Ion Batteries

Nanomaterials

Philippe M. Vereecken¹  Stella Deheryan¹  Alex Radisic¹  Yafa Zargouni²  Khaled Alouani³ 

[1] Imec, Kapeldreef 75, B-3001 Leuven, Belgium;KACST-Intel Consortium Centre of Excellence in Nano-Manufacturing and Applications (CENA), Riyadh 11442, Saudi Arabia;Laboratoire de Chimie Analytique et D’électrochimie, Faculté des Sciences de Tunis, Université de Tunis-El-Manar, Tunis 2092, Tunisie;

关键词: electrodeposition;    EMD;    thin film;    carbon;    3D current collector;    microbatteries;   

DOI  :  10.3390/nano7060126

来源: DOAJ

【 摘 要 】

In this work, we present the electrochemical deposition of manganese dioxide (MnO2) thin films on carbon-coated TiN/Si micro-pillars. The carbon buffer layer, grown by plasma enhanced chemical vapor deposition (PECVD), is used as a protective coating for the underlying TiN current collector from oxidation, during the film deposition, while improving the electrical conductivity of the stack. A conformal electrolytic MnO2 (EMD) coating is successfully achieved on high aspect ratio C/TiN/Si pillar arrays by tailoring the deposition process. Lithiation/Delithiation cycling tests have been performed. Reversible insertion and extraction of Li+ through EMD structure are observed. The fabricated stack is thus considered as a good candidate not only for 3D micorbatteries but also for other energy storage applications.

【 授权许可】

Unknown