MEMS Inertial Sensor Calibration Technology: Current Status and Future Trends

Micromachines

Hang Shang¹  Xu Ru¹  Nian Gu¹  Heng Zhang¹ 

[1] School of Computer and Information Science, Southwest University, Chongqing 400700, China;

关键词: microelectromechanical systems;    inertial sensors;    accelerometer;    gyroscope;    background calibration;    sensor fusion;   

DOI  :  10.3390/mi13060879

来源: DOAJ

【 摘 要 】

A review of various calibration techniques of MEMS inertial sensors is presented in this paper. MEMS inertial sensors are subject to various sources of error, so it is essential to correct these errors through calibration techniques to improve the accuracy and reliability of these sensors. In this paper, we first briefly describe the main characteristics of MEMS inertial sensors and then discuss some common error sources and the establishment of error models. A systematic review of calibration methods for inertial sensors, including gyroscopes and accelerometers, is conducted. We summarize the calibration schemes into two general categories: autonomous and nonautonomous calibration. A comprehensive overview of the latest progress made in MEMS inertial sensor calibration technology is presented, and the current state of the art and development prospects of MEMS inertial sensor calibration are analyzed with the aim of providing a reference for the future development of calibration technology.

【 授权许可】

Unknown