An On-Chip Silicon Photonics Thermometer with Milli-Kelvin Resolution

Applied Sciences

Yijie Pan¹  Jin Wang¹  Jifeng Qu¹  Jianxin Gao²  Yang Shen²  Cheng Zhang³  Zhier Qu³  Tongtong Xu³ 

[1] Center for Advanced Measurement Science, National Institute of Metrology, Beijing 100029, China;College of Optical and Electronic Technology, China Jiliang University, Hangzhou 310018, China;School of Optics and Photonics, Beijing Institution of Technology, Beijing 100081, China;

关键词: photonic thermometer;    WGM resonator;    fabrication technologies;   

DOI  :  10.3390/app12083713

来源: DOAJ

【 摘 要 】

Photonic-based thermometers have been attracting intense research interest as a potential alternative to traditional electrical thermometers due to their physical and chemical stability and immunity to electromagnetic interference. However, due to the high requirements for the stability of the laser source, the existing studies on resolution are only theoretical predictions and do not include real-measured results. In this paper, we report on the fabrication and characterization of an on-chip silicon whispering-gallery-mode (WGM) ring resonator thermometer. The strip grating and the ring structure were fabricated on the silicon-on-insulator (SOI) substrate by two-step etching. The quality-factor (Q-factor), temperature sensitivity, and measurement range of the packaged device were 21,400, 42 pm/K, and 150 K, respectively. The real-measured temperature resolution of 2.9 mK was achieved by virtue of the power and polarization stabilization of the laser source.

【 授权许可】

Unknown