Evaluation System and Correlation Analysis for Determining the Performance of a Semiconductor Manufacturing System

Complex System Modeling and Simulation

Li Li¹  Lin Kuo-Yi¹  Zhao Hui¹  Yu Qingyun¹  Liu Ying² 

[1] Department of Control Science and Engineering, College of Electronics and Information Engineering, Shanghai Institute of Intelligent Science and Technology, and also with Shanghai Research Institute for Intelligent Autonomous Systems, Tongji University, Shanghai 201804, China;Department of Mechanical Engineering, School of Engineering, Cardiff University, The Parade, CF24 3AA, UK;

关键词: semiconductor manufacturing system;    system modeling;    evaluation system;    correlation analysis;   

DOI  :  10.23919/CSMS.2021.0015

来源: DOAJ

【 摘 要 】

Numerous performance indicators exist for semiconductor manufacturing systems. Several studies have been conducted regarding the performance optimization of semiconductor manufacturing systems. However, because of the complex manufacturing processes, potential complementary or inhibitory correlations may exist among performance indicators, which are difficult to demonstrate specifically. To analyze the correlation between the performance indicators, this study proposes a performance evaluation system based on the mathematical significance of each performance indicator to design statistical schemes. Several samples can be obtained by conducting simulation experiments through the performance evaluation system. The Pearson correlation coefficient method and canonical correlation analysis are used on the received samples to analyze linear correlations between the performance indicators. Through the investigation, we found that linear and other complex correlations exist between the performance indicators. This finding can contribute to our future studies regarding performance optimization for the scheduling problems of semiconductor manufacturing.

【 授权许可】

Unknown