Modeling of Catalytic Centers Formation Processes during Annealing of Multilayer Nanosized Metal Films for Carbon Nanotubes Growth

Nanomaterials

OlegI. Il’in¹  MarinaV. Il’ina¹  AlexandrA. Fedotov²  NikolayN. Rudyk²  OlegA. Ageev³  DmitriyI. Cherednichenko³ 

[1] Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering, Southern Federal University, Taganrog 347922, Russia;Laboratory of Nanobiotechnology Problems and New Materials, Southern Federal University, Taganrog, Taganrog 347922, Russia;Research and Education Center “Nanotechnologies”, Southern Federal University, Taganrog 347922, Russia;

关键词: catalytic centers;    thermal annealing;    multilayer nanosized metal films;    carbon nanotubes;   

DOI  :  10.3390/nano10030554

来源: DOAJ

【 摘 要 】

The paper presents a theoretical model of the catalytic centers formation processes during annealing of multilayer nanosized metal films for carbon nanotubes growth. The approach to the description of the model is based on the mass transfer processes under the influence of mechanical thermoelastic stresses, which arise due to the difference in the thermal expansion coefficients of the substrate materials and nanosized metal layers. The thermal stress gradient resulting from annealing creates a drop in the chemical potential over the thickness of the film structure. This leads to the initiation of diffusion mass transfer between the inner and outer surfaces of the films. As a result, the outer surface begins to corrugate and fragment, creating separate islands, which serve as the basis for the catalytic centers formation. Experimental research on the formation of catalytic centers in the structure of Ni/Cr/Si was carried out. It is demonstrated that the proposed model allows to predict the geometric dimensions of the catalytic centers before growing carbon nanotubes. The results can be used to create micro- and nanoelectronics devices based on carbon nanotube arrays.

【 授权许可】

Unknown