A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure

Micromachines

Ming Pang¹  Sen Gu²  Changhai Ru²  Peng Pan³  Xinyu Liu³  Junhui Zhu⁴  Yong Wang⁴  Rongan Zhai⁴ 

[1] College of Automation, Harbin Engineering University, Harbin 150001, China;College of Mechanical and Electrical Engineering & Robotics and Microsystem Center, Soochow University, Suzhou 215021, China;Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON M5S 3G8, Canada;School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China;

关键词: piezoelectric actuation;    stick-slip;    nanopositioning;    friction force;    flexure hinge;   

DOI  :  10.3390/mi11080765

来源: DOAJ

【 摘 要 】

The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the stage, which influences the load capacity, dynamic performance, and positioning accuracy of the PASSNS. Toward solving the influence problems of friction force, this paper presents a novel stick-slip nanopositioning stage where the flexure hinge-based friction force adjusting unit was employed. Numerical analysis was conducted to estimate the static performance of the stage, a dynamic model was established, and simulation analysis was performed to study the dynamic performance of the stage. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the maximum forward and backward movement speeds of the stage are 1 and 0.7 mm/s, respectively, and the minimum forward and backward step displacements are approximately 11 and 12 nm, respectively. Compared to the step displacement under no working load, the forward and backward step displacements only increase by 6% and 8% with a working load of 20 g, respectively. And the load capacity of the PASSNS in the vertical direction is about 72 g. The experimental results confirm the feasibility of the proposed stage, and high accuracy, high speed, and good robustness to varying loads were achieved. These results demonstrate the great potential of the developed stage in many nanopositioning applications.

【 授权许可】

Unknown