Microwave Sensor within a Microfluidic Chip for Biological Applications

Proceedings

Olivier Français¹  Lionel Rousseau¹  Abdellatif El Fellahi²  Thierry Bore²  Bruno Le Pioufle² 

[1] ESYCOM EA2552, Université Paris-Est, Paris, France;SATIE, UMR CNRS 8029, ENS Cachan, University of Paris-Saclay, Cachan, France;

关键词: RF characterization;    RF sensors;    liquids;    picoliter volumes;    microfluidic;    broadband;    dielectric characterization;   

DOI  :  10.3390/proceedings1040523

来源: DOAJ

【 摘 要 】

A miniaturized sensor operating in Radio Frequency region (RF) is proposed to address the need in picoliter liquid characterization. The sensor is based on a coplanar waveguide (CPW) combined with a microfluidic channel dedicated to microliter liquid characterization with perspectives for biology and single cell characterization. Using microtechnology process, the sensor has been designed on a 0.5 mm thick quartz wafer with Cr/Au electrodes. A prototype of the sensor has been fabricated and evaluated with ethanol/water mixtures at different molar fractions of ethanol. A good agreement between theoretical and measured electrical response of the sensor is observed.

【 授权许可】

Unknown