Resonant vacuum gauge

Standartnye Obrazcy

R. E. Kuvandykov¹  R. A. Teteruk¹  V. N. Gorobey¹ 

[1] D. I. Mendeleyev Institute for Metrology;

关键词: vacuum;    pressure;    resonant method;    mems transducer;   

DOI  :  10.20915/2687-0886-2020-16-1-17-23

来源: DOAJ

【 摘 要 】

This article is devoted to development and research of sensitive elements, transducers and vacuum gauges created by resonant method and intended for measuring absolute pressure in a wide range from 10 to 104 Pa.

【 授权许可】

Unknown