Monoscopic Phase Measuring Deflectometry Simulation and Verification

Electronics

Dayi Yin¹  Zhiming Li¹  Huixing Gong¹  Quan Zhang¹ 

[1] Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;

关键词: fringe analysis;    image analysis;    three-dimensional shape measurement;    monoscopic phase measuring deflectometry;    system simulation;   

DOI  :  10.3390/electronics11101634

来源: DOAJ

【 摘 要 】

The three-dimensional (3D) shape of specular surfaces is important in aerospace, precision instrumentation, and automotive manufacturing. The phase measuring deflectometry (PMD) method is an efficient and highly accurate technique to measure specular surfaces. A novel simulation model with simulated fringe patterns for monoscopic PMD is developed in this study. Based on the pre-calibration and the ray-tracing model of the monoscopic PMD system, a comprehensive model from deformed pattern generation to shape reconstruction was constructed. Experimental results showed that this model achieved high levels of measuring accuracy in both planar and concave surfaces measurement. In planar surface measurement, the peak to valley (PV) value and root mean square (RMS) value of the reconstructed shape can reach 26.93 nm and 10.32 nm, respectively. In addition, the accuracy of the reconstructed concave surface can reach a micrometre scale. This work potentially fills critical gaps in monoscopic PMD simulation and provides a cost-effective method of PMD study.

【 授权许可】

Unknown