100 GHz Silicon-based micro-machined patch antenna and arrays

The Journal of Engineering

Jingtian Liu¹  Xiaowen Chen¹  Shuming Chen¹  Ke Xiao² 

[1] College of Computer, National University of Defense Technology;College of Electronic Science and Engineering, National University of Defense Technology;

关键词: microstrip antennas;    antenna arrays;    antenna radiation patterns;    silicon;    micromachining;    antenna feeds;    millimetre wave antennas;    etching;    micromachined BCB-cavity patch antenna;    patches;    Benzocyclobutene polymer material;    silicon substrate;    BCB material;    four-element antenna arrays;    single antenna;    2.8 GHz impedance bandwidth;    100 GHz Silicon-based micromachined patch antenna;    frequency 100.0 GHz;    frequency 2.8 GHz;   

DOI  :  10.1049/joe.2019.0241

来源: DOAJ

【 摘 要 】

This study designs a micro-machined BCB-cavity patch antenna and two types of four-element micro-machined antenna arrays at 100 GHz. The patches are fabricated on Benzocyclobutene (BCB) polymer material. The silicon substrate is selective lateral etched under the patch antenna to fabricate a cavity surrounded by metal and filled with BCB material. The BCB-cavity under patches can reduce the excitation of surface waves and enhance the radiation on performance. A single large BCB-cavity is designed to implement the four-element antenna arrays under the consideration of mutual coupling. The proposed single antenna has a 2.8 GHz impedance bandwidth. At 100 GHz, the simulated maximum gain is 6.7 dBi for the single antenna and 13 dBi for the four-element antenna arrays.

【 授权许可】

Unknown