Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing

Sensors

Xiaojin Zhao¹  Xiaofang Pan² 

[1] College of Electronic Science and Technology, Shenzhen University, Shenzhen 518060, China;College of Information Engineering, Shenzhen University, Shenzhen 518060, China;

关键词: room temperature;    CO gas sensor;    CMOS compatible;    ultra-high sensitivity;   

DOI  :  10.3390/s150408919

来源: DOAJ

【 摘 要 】

In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip gas sensing and processing is enabled. Compared with all previous implementations, the proposed ZnO nanocombs feature much larger effective sensing area and exhibit ultra-high sensitivity even at the room temperature. Specifically, at room temperature, we demonstrate peak sensitivities as high as 7.22 and 8.93 for CO concentrations of 250 ppm and 500 ppm, respectively. As a result, by operating the proposed ZnO-nanocomb-based gas sensor at the room temperature, the widely adopted power consuming heating components are completely removed. This leads to not only great power saving, but also full compatibility between the gas sensor and theon-chip circuitry in term of acceptable operating temperature. In addition, the reported fast response/recovery time of ~200 s/~50 s (250 ppm CO) makes it well suited toreal-life applications.

【 授权许可】

Unknown