Transfer Printing Technology for Fabricating Chemical Sensors Based on Tin Dioxide Nanowires

Proceedings

Robert Wimmer-Teubenbacher¹  Florentyna Sosada-Ludwikowska¹  Anton Köck¹ 

[1] Microelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, Austria;

关键词: SnO₂;    nanowires;    transfer printing;    PDMS;   

DOI  :  10.3390/proceedings2131076

来源: DOAJ

【 摘 要 】

Multi-nanowire based chemical gas sensors were produced employing a fast and simple transfer printing technology. SnO₂ nanowires (NWs) were grown by a specific two-step technology including spray pyrolysis deposition and a thermal annealing process in presence of a Cu-catalyst. Subsequently the SnO₂ NWs were print transferred by a polydimethylsiloxane (PDMS) stamp on Si-substrates with gold inter-digital electrode structures (IDES) creating a multi-NW chemical sensing device. The print-transfer technology enables a fast, easy and cheap fabrication of NW-based sensor devices with a good reproducibility. High sensitivity to H2S has been achieved, the performance results are presented in this work.

【 授权许可】

Unknown