Piezoelectric MEMS Linear Motor for Nanopositioning Applications

Actuators

Helmut Seidel¹  Abdallah Ababneh²  Víctor Ruiz-Díez³  JoséLuis Sánchez-Rojas³  Javier Toledo³  Jorge Hernando-García³ 

[1] Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, 66123 Saarbrücken, Germany;Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, Irbid 21163, Jordan;Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, Spain;

关键词: traveling wave;    standing wave;    bidirectional linear motion;    conveyor;    nanopositioning;    piezoelectric;   

DOI  :  10.3390/act10020036

来源: DOAJ

【 摘 要 】

This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimized for travelling or standing wave generation, while the addition of 3D-printed legs allowed for a controlled contact and amplified displacement, a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders of several times the motor weight, with speeds of 1.7 mm/s by travelling waves generated at 6 V and 19.3 kHz. In this paper both travelling and standing wave motors are compared. By the optimization of various aspects of the device such as the vibrational modes, leg collocation and excitation signals, speeds as high as 35 mm/s, and payloads above 10 times the motor weight were demonstrated. The devices exhibited a promising positional resolution while actuated with only a few sinusoidal cycles in an open-loop configuration. Discrete steps as low as 70 nm were measured in the conveyance of 2-mg sliders.

【 授权许可】

Unknown