Structure Function Analysis of Temperature-Dependent Thermal Properties of Nm-Thin Nb2O5

Energies

Elke Kraker¹  Stefan Defregger¹  Lisa Mitterhuber¹ 

[1] Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria;

关键词: thermal conductivity;    niobium pentoxide;    structure function;    time domain thermoreflectance;    thin film;   

DOI  :  10.3390/en12040610

来源: DOAJ

【 摘 要 】

A 166-nm-thick amorphous Niobium pentoxide layer (Nb₂O₅) on a silicon substrate was investigated by using time domain thermoreflectance at ambient temperatures from 25 °C to 500 °C. In the time domain thermoreflectance measurements, thermal transients with a time resolution in (sub-)nanoseconds can be obtained by a pump-probe laser technique. The analysis of the thermal transient was carried out via the established analytical approach, but also by a numerical approach. The analytical approach showed a thermal diffusivity and thermal conductivity from 0.43 mm²/s to 0.74 mm²/s and from 1.0 W/mK to 2.3 W/mK, respectively to temperature. The used numerical approach was the structure function approach to map the measured heat path in terms of a R_thC_th-network. The structure function showed a decrease of R_th with increasing temperature according to the increasing thermal conductivity of Nb₂O₅. The combination of both approaches contributes to an in-depth thermal analysis of Nb₂O₅ film.

【 授权许可】

Unknown