Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry

Energies

Ida De Michelis¹  Francesco Vegliò¹  Svetlana B. Zueva¹  Valentina Innocenzi¹ 

[1] Department of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, Italy;

关键词: tetramethylammonium hydroxide;    industrial and organic wastewater;    E&S industry;    pilot scale activity;    aerobic treatment;    chemical precipitation;   

DOI  :  10.3390/en14175340

来源: DOAJ

【 摘 要 】

TMAH is quaternary ammonium salt, consists of a methylated nitrogen molecule, and is widely used in the electronics industry as a developer and silicon etching agent. This substance is toxic and fatal if ingested. It can also cause skin burns, eye damage, and organ damage. Moreover, TMAH exhibits long-lasting toxicity to aquatic systems. Despite this known toxicity, the authorities currently do not provide emission limits (i.e., discharge concentrations) for wastewater by EU regulation. The current scenario necessitates the study of the processes for industrial wastewater containing TMAH. This work aims to present a successful example of the treatment process for the degradation of TMAH waste solutions of the E&S industry. Research was conducted at the pilot scale, and the process feasibility (both technical and economic) and its environmental sustainability are demonstrated. This process, which treats three exhausted solutions with a high concentration of toxic substances, is considered to be innovative.

【 授权许可】

Unknown