Fabrication and Characterization of Flexible Capacitive Humidity Sensors Based on Graphene Oxide on Porous PTFE Substrates

Sensors

Zhenyu Wei¹  Jianqiu Huang¹  Wenhao Chen¹  Qingan Huang¹ 

[1] Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China;

关键词: humidity sensor;    flexibility substrate;    polytetrafluoroethylene (PTFE);    hydrophobic;   

DOI  :  10.3390/s21155118

来源: DOAJ

【 摘 要 】

Porous polytetrafluoroethylene (PTFE) is physically flexible, thermally and chemically stable, relatively inexpensive, and commercially available. It is attractive for various flexible sensors. This paper has studied flexible capacitive humidity sensors fabricated on porous PTFE substrates. Graphene oxide (GO) was used as a sensing material, both hydrophobic and hydrophilic porous PTFE as the substrates, and interdigitated electrodes on the PTFE substrates were screen-printed. SEM and Raman spectrum were utilized to characterize GO and PTFE. An ethanol soak process is developed to increase the yield of the humidity sensors based on hydrophobic porous PTFE substrates. Static and dynamic properties of these sensors are tested and analyzed. It demonstrates that the flexible capacitive humidity sensors fabricated on the ethanol-treated hydrophobic PTFE exhibit high sensitivity, small hysteresis, and fast response/recovery time.

【 授权许可】

Unknown