Planar Microstrip Ring Resonators for Microwave-Based Gas Sensing: Design Aspects and Initial Transducers for Humidity and Ammonia Sensing

Sensors

Gunter Hagen¹  Stefanie Walter¹  Jaroslaw Kita¹  Ralf Moos¹  Andreas Bogner¹  Carsten Steiner¹ 

[1] Department of Functional Materials, University of Bayreuth, 95447 Bayreuth, Germany;

关键词: microwave cavity perturbation;    resonant frequency;    radio frequency based gas sensors;    zeolites;    in operando spectroscopy;   

DOI  :  10.3390/s17102422

来源: DOAJ

【 摘 要 】

A planar microstrip ring resonator structure on alumina was developed using the commercial FEM software COMSOL. Design parameters were evaluated, eventually leading to an optimized design of a miniaturized microwave gas sensor. The sensor was covered with a zeolite film. The device was successfully operated at around 8.5 GHz at room temperature as a humidity sensor. In the next step, an additional planar heater will be included on the reverse side of the resonator structure to allow for testing of gas-sensitive materials under sensor conditions.

【 授权许可】

Unknown