期刊论文详细信息
| Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki | |
| IDENTIFICATION OF NONLINEAR MODEL PARAMETERS FOR RAPID THERMAL PROCESSES | |
| 关键词: nonlinear system identification; prediction error minimization; rapid thermal processes; vapor deposition processing; | |
| DOI : | |
| 来源: DOAJ | |
【 授权许可】
Unknown