期刊论文详细信息
Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki | |
IDENTIFICATION OF NONLINEAR MODEL PARAMETERS FOR RAPID THERMAL PROCESSES | |
关键词: nonlinear system identification; prediction error minimization; rapid thermal processes; vapor deposition processing; | |
DOI : | |
来源: DOAJ |
【 授权许可】
Unknown