High Reflectivity YDH/SiO2 Distributed Bragg Reflector for UV-C Wavelength Regime

IEEE Photonics Journal

Wong Kim Chong¹  Ahmed Y. Alyamani²  Abdulrahman M. Albadri²  Malleswararao Tangi³  Mohd Sharizal Alias³  Abdullah A. Alatawi³  Mohammad Khaled Shakfa³  Edgars Stegenburgs³  Jorge A. Holguin-Lerma³  Boon S. Ooi³  Tien Khee Ng³ 

[1] Core Labs, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia;National Center for Nanotechnology, King Abdulaziz City for Science and Technology, Riyadh, Saudi Arabia;Photonics Laboratory, Computer, Electrical and Mathematical Science and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia;

关键词: Distributed Bragg reflector;    thin films;    ultraviolet.;   

DOI  :  10.1109/JPHOT.2018.2804355

来源: DOAJ

【 摘 要 】

A distributed Bragg reflector (DBR) composed of Y₂O₃-doped HfO₂ (YDH)/SiO₂ layers with high reflectivity spectrum centered at a wavelength of ~240 nm is fabricated using radio-frequency magnetron sputtering. Before the DBR deposition, optical properties for a single layer of YDH, SiO₂, and HfO₂ thin films were studied using spectroscopic ellipsometry and spectrophotometry. To investigate the performance of YDH as a material for the high refractive index layer in the DBR, a comparison of its optical properties was made with HfO₂ thin films. Due to larger optical bandgap, the YDH thin films demonstrated higher transparency, lower extinction coefficient, and lower absorption coefficient in the UV-C regime (especially for wavelengths below 250 nm) compared to the HfO₂ thin films. The fabricated YDH/SiO₂ DBR consisting of 15 periods achieved a reflectivity higher than 99.9% at the wavelength of ~240 nm with a stopband of ~50 nm. The high reflectivity and broad stopband of YDH/SiO₂ DBRs will enable further advancement of various photonic devices such as vertical-cavity surface-emitting lasers, resonant-cavity light-emitting diodes, and resonant-cavity photodetectors operating in the UV-C wavelength regime.

【 授权许可】

Unknown