Point-Mass Model for Nano-Patterning Using Dip-Pen Nanolithography (DPN)

Sensors & Transducers

Seok-Won Kang¹  Debjyoti Banerjee¹ 

[1] Department of Mechanical Engineering, Texas A&M University 3123 TAMU, College Station, TX 77843-3123, United States;

关键词: Derjaguin-muller-toporov;    Contact theory;    Vibration;    Beam theory;   

DOI  :  

来源: DOAJ

【 摘 要 】

Micro-cantilevers are frequently used as scanning probes and sensors in micro-electromechanical systems (MEMS). Usually micro-cantilever based sensors operate by detecting changes in cantilever vibration modes (e.g., bending or torsional vibration frequency) or surface stresses - when a target analyte is adsorbed on the surface. The catalyst for chemical reactions (i.e., for a specific analyte) can be deposited on micro-cantilevers by using Dip-Pen Nanolithography (DPN) technique. In this study, we simulate the vibration mode in nano-patterning processes by using a Point-Mass Model (or Lumped Parameter Model). The results from the simulations are used to derive the stability of writing and reading mode for a particular driving frequency during the DPN process. In addition, we analyze the sensitivity of the tip-sample interaction forces in fluid (ink solution) by utilizing the Derjaguin-Muller-Toporov (DMT) contact theory.

【 授权许可】

Unknown