Metrological Array of Cyber-Physical Systems. Part 13. Segmental Approximation for Surface Topology Reconstruction

Sensors & Transducers

Eberhard MANSKE¹  Bohdan STADNYK²  Anna KHOMA²  Svyatoslav YATSYSHYN² 

[1] Ilmenau University of Technology, Department of Production and Precision Metrology, Gustav-Kirchhoff-Str. 1, D-98693 Ilmenau, Germany;‘Lviv Polytechnic’ National University, Institute of Computer Technologies, Automation and Metrology, Bandera str.12, Lviv, 79013, Ukraine ;

关键词: White-Light Interferometry;    Topology Reconstruction;    Mathematical Model;    Approximation;    Peak Detection;    Optical Metrology.;   

DOI  :  

来源: DOAJ

【 摘 要 】

This article presents the segment approximation method for surface topology reconstruction from white light interferogram. The method involves polynomial approximation of separate interferogram segments, and polynomial coefficients are computed at calibration stage. Metrological properties of proposed method are investigated by interferogram modeling tilted and spherical surfaces.

【 授权许可】

Unknown