Influence of microwave plasma parameters on light emission from SiV color centers in nanocrystalline diamond films

Open Chemistry

Csíkvári Péter¹  Himics László²  Tóth Sára²  Veres Miklós²  Koós Margit² 

[1] Department of Atomic Physics, Budapest University of Technology and Economics, H-1521 Budapest, Hungary>;Institute for Solid State Physics and Optics, Wigner Research Centre for Physics of the Hungarian Academy of Sciences, H-1525 Budapest, Hungary;

关键词: nanocrystalline diamond;    mw cvd;    siv color center;    photoluminescence;    raman scattering;   

DOI  :  10.1515/chem-2015-0034

来源: DOAJ

【 摘 要 】

Zero phonon line (ZPL) shape, position and integral intensity of SiV defect center in diamond is presented for nanocrystalline diamond (NCD) films grown at different conditions, NCD films of average grain sizes from ~50 nm up to ~180 nm have been deposited onto c-Si wafer at substrate temperature of 700 and 850oC from mixture with different CH4 and H2 ratios using MWCVD process. Light emission of SiV defect center and Raman scattering properties of NCD samples were measured on a Renishaw micro-Raman spectrometer with 488 nm excitation. Scanning electron microscopy images were used for monitoring surface morphology and for the analysis of the average grain sizes. Sample thickness was determined by in situ laser reflection interferometry. Characteristics of SiV ZPL are discussed in light of the morphology, bonding structure and average grain size of NCD films.

【 授权许可】

Unknown