MEMS Variable Area Capacitor for Room Temperature Electrometry

Proceedings

George Underwood¹  Tod Laurvick¹ 

[1] Air Force Institute of Technology, Wright-Patterson AFB, OH 45433, USA;

关键词: MEMS;    electrometer;    single-electron;    high resolution;    charge;    room temperature;   

DOI  :  10.3390/proceedings2131075

来源: DOAJ

【 摘 要 】

This paper introduces a new way to detect charge using MEMS variable capacitors for extremely sensitive, room temperature electrometry. It is largely based on the electrometers introduced by Riehl et al. [1] except variable capacitance is created by a changing area, not a changing gap. The new scheme will improve MEMS electrometers by eliminating the effects of squeeze-film damping and by theoretically increasing the maximum charge resolution by 70%. The charge conversion gain (the increase in output voltage per input unit charge) for this system is derived. The result show good agreement with MATLAB calculations.

【 授权许可】

Unknown