Detection of Hydrogen by Noble Metal Treated Nanoporous Si and ZnO Thin Films

Sensors & Transducers

Anita LLOYD SPETZ¹  Sukumar BASU²  Palash Kumar BASU²  Jayita KANUNGO² 

[1] Dept. of Physics, Chemistry and Biology, Linkoping University, SE-581 83 Linköping, Sweden;IC Design and Fabrication Center, Department of Electronics and Telecommunication Engineering, Jadavpur University, Kolkata- 700032, West Bengal, India;

关键词: Nanocrystalline;    Nanoporous;    Silicon;    Zinc oxide;    Pd modification;    Hydrogen sensor.;   

DOI  :  

来源: DOAJ

【 摘 要 】

Nanoporous silicon and nanoporous ZnO were prepared by the electrochemical anodization of crystalline Si and Zn substrates, respectively. To passivate the defect states and to improve the gas sensitivity the porous silicon and nano crystalline ZnO surfaces were treated with aqueous solution of PdCl2. The Pd modified sensors with Pd-Ag (26 %)/PS/Si/Al (MIS) and Pd-Ag (26 %)/ZnO/Zn (MIM) device structures were investigated regarding the hydrogen sensing performance. Both sensors showed promising performance in terms of operating temperature, response magnitude, response time and recovery time. While the PS MIS sensors showed optimum performance at room temperature the ZnO MIM sensors showed faster response at 50oC, both demonstrating long term stable operations.

【 授权许可】

Unknown