An Inkjet Printing Technique for Scalable Microfabrication of Graphene-Based Sensor Components

IEEE Access

Guan-Yu Chen¹  Yu-Min Fu²  Che-Hao Kang²  Yu-Ting Cheng²  Meng-Chuin Chou²  Pu-Wei Wu³  Ethan B. Secor⁴  Mark C. Hersam⁴ 

[1] Department of Biomedical Engineering, National Chiao Tung University, Hsinchu, Taiwan;Department of Electronics Engineering, National Chiao Tung University, Hsinchu, Taiwan;Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan;Department of Materials Science and Engineering, Northwestern University, Evanston, IL, USA;

关键词: Microelectromechanical systems;    inkjet printing;    microstructure;    tactile sensors;   

DOI  :  10.1109/ACCESS.2020.2990501

来源: DOAJ

【 摘 要 】

This paper presents a versatile and precise graphene patterning technique using the combined process of masking and inkjet printing. A graphene-based structure is fabricated by first defining the structural pattern and position using a masking mold, which can be either electroplated copper or deep reactive ion etching (DRIE) silicon shadow mask, followed by inkjet deposition of graphene ink and lift-off. The hybrid technique can realize high-fidelity, high-resolution graphene-based microstructures including free-standing and cantilever beams, four-point resistive measurement structures, and piezoresistive sensing elements with a minimum line width of $\sim 20~\mu \text{m}$ . Moreover, this method can facilitate the micropatterning of graphene oxide (GO) and reduced graphene oxide (rGO) on substrates such as polydimethylsiloxane (PDMS) and SiO2/Si for selective cell culturing applications. Owing to the characteristics of low chemical usage, low process temperature and complexity, and high flexibility and fault tolerance of inkjet printing, this technique demonstrates compelling potential for a variety of biomedical applications.

【 授权许可】

Unknown