High Responsivity Thermopile Sensors Featuring a Mosaic Structure

Micromachines

Elisabetta Moisello¹  Piero Malcovati¹  Edoardo Bonizzoni¹  Maria Eloisa Castagna²  Giuseppe Bruno²  Antonella La Malfa² 

[1] Department of Electrical, Computer and Biomedical Engineering, University of Pavia, Via Ferrata 5, 2100 Pavia, Italy;STMicroelectronics, 95121 Catania, Italy;

关键词: thermopile;    TMOS;    thermal sensor;    proximity;    motion;    temperature;   

DOI  :  10.3390/mi13060934

来源: DOAJ

【 摘 要 】

This paper presents a detailed analysis of a micromachined thermopile detector featuring high responsivity and a versatile mosaic structure, based on 128 60 µm × 60 µm pixels connected in series and/or in parallel. The mosaic structure is based on the one employed for the thermal sensor known as TMOS, which consists of a CMOS-SOI transistor embedded in a suspended and thermally isolated absorbing membrane, released through microelectro mechanical system (MEMS) post-processing. Two versions of the thermopile detector, featuring different series/parallel connections, are presented and were experimentally characterized. The most performant of the two achieved 2.7 × 10${}^4$ V/W responsivity. The thermopile sensors’ performances are compared to that of the TMOS sensor, adopting different configurations, and their application as proximity detectors was verified through measurements.

【 授权许可】

Unknown