Optimum Combination and Effect Analysis of Piezoresistor Dimensions in Micro Piezoresistive Pressure Sensor Using Design of Experiments and ANOVA: a Taguchi Approach

Sensors & Transducers

Kirankumar B. Balavalad¹  B. G. Sheeparamatti¹ 

[1] Department of Electronics and Communication Engineering, Basaveshwar Engineering College, Bagalkot-587103, Karnataka, India (Affiliated to VTU, Belagavi, Karnataka, India);

关键词: MEMS;    Pressure sensors;    Piezoresistive pressure sensors;    DoE;   

DOI  :  

来源: DOAJ

【 摘 要 】

Piezoresistive (PZR) pressure sensors have gained importance because of their robust construction, high sensitivity and good linearity. The conventional PZR pressure sensor consists of 4 piezoresistors placed on diaphragm and are connected in the form of Wheatstone bridge. These sensors convert stress applied on them into change in resistance, which is quantified into voltage using Wheatstone bridge mechanism. It is observed form the literature that, the dimensions of piezoresistors are very crucial in the performance of the piezoresistive pressure sensor. This paper presents, a novel mechanism of finding best combinations and effect of individual piezoresistors dimensions viz., Length, Width and Thickness, using DoE and ANOVA (Analysis of Variance) method, following Taguchi experimentation approach. The paper presents a unique method to find optimum combination of piezoresistors dimensions and also clearly illustrates the effect the dimensions on the output of the sensor. The optimum combinations and the output response of sensor is predicted using DoE and the validation simulation is done. The result of the validation simulation is compared with the predicted value of sensor response i.e., V. Predicted value of V is 1.074 V and the validation simulation gave the response for V as 1.19 V. This actually validates that the model (DoE and ANOVA) is adequate in describing V in terms of the variables defined.

【 授权许可】

Unknown