Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries

Coatings

Oleksiy Lyutakov¹  Denis Nazarov²  Maxim Maximov³  Aleksander Rymyantsev³  Yury Koshtyal³  Anatoly Popovich³  Ilya Mitrofanov³  Artem Kim³  Ilya Ezhov³ 

[1] Department of Solid State Engineering, Institute of Chemical Technology, 16628 Prague, Czech Republic;Institute of Chemistry, Saint Petersburg State University, 7/9 Universitetskaya nab, 199034 St. Petersburg, Russia;Institute of Metallurgy, Mechanical Engineering and Transport, Peter the Great Saint-Petersburg Polytechnic University, 195221 Saint Petersburg, Russia;

关键词: atomic layer deposition;    nickel oxide;    Li-ion batteries;    thin films;   

DOI  :  10.3390/coatings9050301

来源: DOAJ

【 摘 要 】

Atomic layer deposition (ALD) provides a promising route for depositing uniform thin-film electrodes for Li-ion batteries. In this work, bis(methylcyclopentadienyl) nickel(II) (Ni(MeCp)₂) and bis(cyclopentadienyl) nickel(II) (NiCp₂) were used as precursors for NiO ALD. Oxygen plasma was used as a counter-reactant. The films were studied by spectroscopic ellipsometry, scanning electron microscopy, atomic force microscopy, X-ray diffraction, X-ray reflectometry, and X-ray photoelectron spectroscopy. The results show that the optimal temperature for the deposition for NiCp₂ was 200−300 °C, but the optimal Ni(MeCp)₂ growth per ALD cycle was 0.011−0.012 nm for both precursors at 250−300 °C. The films deposited using NiCp₂ and oxygen plasma at 300 °C using optimal ALD condition consisted mainly of stoichiometric polycrystalline NiO with high density (6.6 g/cm³) and low roughness (0.34 nm). However, the films contain carbon impurities. The NiO films (thickness 28−30 nm) deposited on stainless steel showed a specific capacity above 1300 mAh/g, which is significantly more than the theoretical capacity of bulk NiO (718 mAh/g) because it includes the capacity of the NiO film and the pseudo-capacity of the gel-like solid electrolyte interface film. The presence of pseudo-capacity and its increase during cycling is discussed based on a detailed analysis of cyclic voltammograms and charge−discharge curves (U(C)).

【 授权许可】

Unknown