Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2

Beilstein Journal of Nanotechnology

Cornelis W. Hagen¹  Aya Mahgoub¹  Titel Jurca²  Konstantin Preradovic²  Rachel M. Thorman³  Howard Fairbrother³  Hang Lu⁴  Lisa McElwee-White⁴ 

[1] Delft University of Technology, Fac. Applied Sciences, Dept. Imaging Physics, Lorentzweg 1, 2628CJ Delft, Netherlands;Department of Chemistry and the Renewable Energy and Chemical Transformations Cluster, University of Central Florida, Orlando, Florida, 32816-2366, USA;Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA;Department of Chemistry, University of Florida, Gainesville, Florida, 32611-7200, USA;

关键词: energy-dispersive x-ray spectroscopy (edx);    focused electron beam-induced deposition (febid);    nanofabrication;    platinum precursors;    scanning electron microscopy (sem);    thermogravimetric analysis (tga);   

DOI  :  10.3762/bjnano.11.161

来源: DOAJ

【 摘 要 】

Two platinum precursors, Pt(CO)2Cl2 and Pt(CO)2Br2, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments in a scanning electron microscope (SEM), wherein series of pillars were successfully grown from both precursors. The growth of the pillars was studied as a function of the electron dose and compared to deposits grown from the commercially available precursor MeCpPtMe3. The composition of the deposits was determined using energy-dispersive X-ray spectroscopy (EDX) and compared to the composition of deposits from MeCpPtMe3, as well as deposits made in an ultrahigh-vacuum (UHV) environment. A slight increase in metal content and a higher growth rate are achieved in the SEM for deposits from Pt(CO)2Cl2 compared to MeCpPtMe3. However, deposits made from Pt(CO)2Br2 show slightly less metal content and a lower growth rate compared to MeCpPtMe3. With both Pt(CO)2Cl2 and Pt(CO)2Br2, a marked difference in composition was found between deposits made in the SEM and deposits made in UHV. In addition to Pt, the UHV deposits contained halogen species and little or no carbon, while the SEM deposits contained only small amounts of halogen species but high carbon content. Results from this study highlight the effect that deposition conditions can have on the composition of deposits created by FEBID.

【 授权许可】

Unknown