Interactive Manipulation of Nonconductive Microparticles in Scanning Electron Microscope by a Virtual Nano-Hand Strategy

Micromachines

Brandon Borom¹  Zhenzhong Wei²  Kai Cheng²  Xiangzheng Qin²  Tao Wang²  Jinjun Rao²  Weilin Su²  Mei Liu²  Jinbo Chen²  Yunpeng Feng³ 

[1] Department of Nutrition Science and Dietetics in the College of Agriculture, Biotechnology, and Natural Resources, University of Nevada, Reno, NV 89557, USA;Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China;Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen 518000, China;

关键词: scanning electron microscope (sem);    interactive micromanipulation;    nonconductive microparticle;    virtual nano-hand strategy;   

DOI  :  10.3390/mi10100670

来源: DOAJ

【 摘 要 】

Micro/nano-manipulation is the fabrication of particular constructs on devices at the micro/nano-scale. Precise manipulation of microparticles is one of the key technological difficulties in manufacturing micro/nano-scale components. Based on scanning electron microscopy and nanomanipulator, this paper adopts a direct push method to operate randomly distributed microparticles into ordered structures. A two-probe interaction strategy is proposed to enable microparticle movements in all directions efficiently and avoid scratching the substrate surface. To overcome the uncertainties in micromanipulation, a virtual nano-hand strategy was also implemented: long-range advance of each microparticle is realized by multiple single-step pushes, whose trajectory is theoretically analyzed. The pushes are well programmed to imitate effects of a more powerful and determined hand. Experimental results show that the theoretical single-step motion trajectory is in line with actual operation, and the proposed strategy can ensure precise operation of the microparticles in all directions and improve reliability and effectiveness of operation.

【 授权许可】

Unknown