Sensors | |
Thin-Film-Based SAW Magnetic Field Sensors | |
Vadim Lebedev1  Agnė Žukauskaitė1  Stefan Moench1  Florian Niekiel2  Jingxiang Su2  Thorsten Giese2  Fabian Lofink2  Jana Marie Meyer2  Simon Fichtner2  Erdem Yarar2  Lars Thormählen3  Viktor Schell3  Eckhard Quandt3  Anne Kittmann3  | |
[1] Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany;Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany;Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany; | |
关键词: surface acoustic waves; surface acoustic wave sensor; magnetic field sensor; current sensor; magnetostriction; AlScN; | |
DOI : 10.3390/s21248166 | |
来源: DOAJ |
【 摘 要 】
In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO2 layer, and a magnetostrictive FeCoSiB film. The detection limit of this sensor is 2.4 nT/
【 授权许可】
Unknown