Thin-Film-Based SAW Magnetic Field Sensors

Sensors

Vadim Lebedev¹  Agnė Žukauskaitė¹  Stefan Moench¹  Florian Niekiel²  Jingxiang Su²  Thorsten Giese²  Fabian Lofink²  Jana Marie Meyer²  Simon Fichtner²  Erdem Yarar²  Lars Thormählen³  Viktor Schell³  Eckhard Quandt³  Anne Kittmann³ 

[1] Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany;Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany;Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany;

关键词: surface acoustic waves;    surface acoustic wave sensor;    magnetic field sensor;    current sensor;    magnetostriction;    AlScN;   

DOI  :  10.3390/s21248166

来源: DOAJ

【 摘 要 】

In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO₂ layer, and a magnetostrictive FeCoSiB film. The detection limit of this sensor is 2.4 nT/$\sqrt{\mathrm{Hz}}$ at 10 Hz and 72 pT/$\sqrt{\mathrm{Hz}}$ at 10 kHz at an input power of 20 dBm. The dynamic range was found to span from about $\pm$1.7 mT to the corresponding limit of detection, leading to an interval of about 8 orders of magnitude. Fabrication, achieved sensitivity, and noise floor of the sensors are presented.

【 授权许可】

Unknown