InfoMat | |
Photonic devices fabricated from (111)‐oriented single crystal diamond | |
Blake Regan1  Aleksandra Trycz1  Kerem Bray1  Sejeong Kim1  Anh T. H. Ly1  Milos Toth1  Igor Aharonovich1  Kumaravelu Ganesan2  | |
[1] School of Mathematical and Physical Sciences, University of Technology Sydney Ultimo New South Wales Australia;School of Physics, University of Melbourne Melbourne Victoria Australia; | |
关键词: cavity; color centers; diamond; | |
DOI : 10.1002/inf2.12090 | |
来源: DOAJ |
【 摘 要 】
Abstract Diamond is a material of choice in the pursuit of integrated quantum photonic technologies. So far, the majority of photonic devices fabricated from diamond are made from (100)‐oriented crystals. In this work, we demonstrate a methodology for the fabrication of optically active membranes from (111)‐oriented diamond. We use a liftoff technique to generate membranes, followed by chemical vapor deposition of diamond in the presence of silicon to generate homogenous silicon vacancy color centers with emission properties that are superior to those in (100)‐oriented diamond. We further use the diamond membranes to fabricate microring resonators with quality factors exceeding ~ 3000. Supported by finite‐difference time‐domain calculations, we discuss the advantages of (111)‐oriented structures as building blocks for quantum nanophotonic devices.
【 授权许可】
Unknown