Fabrication of High Aspect Ratio Micro-Structures with Superhydrophobic and Oleophobic Properties by Using Large-Area Roll-to-Plate Nanoimprint Lithography

Nanomaterials

Pim Veldhuizen¹  JanMatthijs ter Meulen¹  Marc Dielen¹  Nipapan Klunngien²  Nithi Atthi²  Wutthinan Jeamsaksiri²  Pawasuth Saengdee²  Jakrapong Supadech²  Oraphan Thongsook²  Norabadee Ranron²  Krynnaras Pankong²  Rattanawan Meananeatra²  Witsaroot Sripumkhai²  Warinrampai Uahchinkul²  Pattaraluck Pattamang² 

[1] Morphotonics B.V., De Run 4281, 5503 LM Veldhoven, The Netherlands;Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center (NECTEC), Chachoengsao 24000, Thailand;

关键词: high aspect ratio micro-structure;    roll-to-plate nanoimprint lithography;    superhydrophobic;    oleophobic;    biomimetic surface;    large-area patterning;   

DOI  :  10.3390/nano11020339

来源: DOAJ

【 摘 要 】

Bio-inspired surfaces with superamphiphobic properties are well known as effective candidates for antifouling technology. However, the limitation of large-area mastering, patterning and pattern collapsing upon physical contact are the bottleneck for practical utilization in marine and medical applications. In this study, a roll-to-plate nanoimprint lithography (R2P NIL) process using Morphotonics’ automated Portis NIL600 tool was used to replicate high aspect ratio (5.0) micro-structures via reusable intermediate flexible stamps that were fabricated from silicon master molds. Two types of Morphotonics’ in-house UV-curable resins were used to replicate a micro-pillar (PIL) and circular rings with eight stripe supporters (C-RESS) micro-structure onto polycarbonate (PC) and polyethylene terephthalate (PET) foil substrates. The pattern quality and surface wettability was compared to a conventional polydimethylsiloxane (PDMS) soft lithography process. It was found that the heights of the R2P NIL replicated PIL and C-RESS patterns deviated less than 6% and 5% from the pattern design, respectively. Moreover, the surface wettability of the imprinted PIL and C-RESS patterns was found to be superhydro- and oleophobic and hydro- and oleophobic, respectively, with good robustness for the C-RESS micro-structure. Therefore, the R2P NIL process is expected to be a promising method to fabricate robust C-RESS micro-structures for large-scale anti-biofouling application.

【 授权许可】

Unknown