Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities

Sensors

Alexander Kromka¹  Ondrej Szabó¹  Michal Kočí¹  Adam Bouřa²  Miroslav Husák² 

[1] Department of Diamond and Associated Materials, Institute of Physics of the Czech Academy of Sciences, 162 00 Prague, Czech Republic;Department of Microelectronics, Faculty of Electrical Engineering, Czech Technical University in Prague, 166 27 Prague, Czech Republic;

关键词: nanocrystalline diamond (NCD);    metal oxide (MO_X);    gas detectors;   

DOI  :  10.3390/s21165390

来源: DOAJ

【 摘 要 】

A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MO_X) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO₂) and reducing (NH₃). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors, namely H-terminated NCD and SnO₂, are described.

【 授权许可】

Unknown