Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation

Proceedings

Silvia Adorno¹  Fabrizio Cerini¹ 

[1] STMicroelectronics, Via Tolomeo 1, 20010 Cornaredo (MI), Italy;

关键词: simulation platform, MEMS microphones, piezoelectric microphones, multilayers piezoelectric MEMS;   

DOI  :  10.3390/proceedings2130862

来源: DOAJ

【 摘 要 】

A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone.

【 授权许可】

Unknown