Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

Sensors

Norikazu Ohta¹  Motohiro Fujiyoshi¹  Takashi Ozaki¹ 

[1] Toyota Central R&D Labs. Inc., Nagakute 480-1192, Aichi, Japan;

关键词: piezoelectric actuator;    scanning mirror;    PIN-PMN-PT;    compliant mechanism;   

DOI  :  10.3390/s22114215

来源: DOAJ

【 摘 要 】

Laser scanners with mechanically driven mirrors have exhibited increasing potential for various applications, such as displays and laser radar. Resonant scanners are the predominantly used scanners; however, non-resonant scanners are required for applications where point-to-point driving is desirable. Because a non-resonant drive cannot amplify the drive angle owing to the resonance phenomenon, high values are difficult to achieve for the main performance metrics of the scanners: mirror area, drive angle, and operating frequency. In this paper, we present a two-axis scanner with a piezoelectric actuator made of a piezoelectric single-crystal Pb(In_1/2Nb_1/2)O₃-Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ as the actuation force source. The scanner contains a circular mirror with a diameter of 7 mm and achieves an average static mechanical deflection angle amplitude of 20.8° in two axes with a resonant frequency of 559 Hz. It is equipped with a transmission mechanism that can decouple each axis to achieve high linearity; in our study, the nonlinearity error was less than 1°.

【 授权许可】

Unknown