Three-Dimensional Soft Material Micropatterning via Grayscale Photolithography for Improved Hydrophobicity of Polydimethylsiloxane (PDMS)

Micromachines

Sofiyah Sal Hamid¹  Beh Khi Khim¹  Khairu Anuar Mohamad Zain¹  Nuha Abd Rhaffor¹  Mohammad Faiz Mohamed Omar¹  Asrulnizam Abd Manaf¹  Intan Sue Liana Abdul Hamid² 

[1] Collaborative Microelectronic Design Excellence Center (CEDEC), Sains@USM, Universiti Sains Malaysia, Bayan Lepas 11900, Pulau Pinang, Malaysia;Faculty of Electrical and Electronic Engineering, Universiti Tun Hussein Onn Malaysia, Batu Pahat 86400, Johor, Malaysia;

关键词: grayscale lithography;    hydrophobic;    micro 3D structure;    droplet;    contact angle;   

DOI  :  10.3390/mi13010078

来源: DOAJ

【 摘 要 】

In this present work, we aim to improve the hydrophobicity of a polydimethylsiloxane (PDMS) surface. Various heights of 3D PDMS micropillars were fabricated via grayscale photolithography, and improved wettability was investigated. Two approaches of PDMS replication were demonstrated, both using a single master mold to obtain the micropillar arrays. The different heights of fabricated PDMS micropillars were characterized by scanning electron microscopy (SEM) and a surface profiler. The surface hydrophobicity was characterized by measuring the water contact angles. The fabrication of PDMS micropillar arrays was shown to be effective in modifying the contact angles of pure water droplets with the highest 157.3-degree water contact angle achieved by implementing a single mask grayscale lithography technique.

【 授权许可】

Unknown