Simulation of radiation effects in ultra-thin insulating layers

Nuclear Technology and Radiation Protection

关键词: insulator;    proton;    alpha particle;    ion beam;    radiation effect;    Monte Carlo simulation;   

DOI  :  10.2298/NTRP1303308T

来源: DOAJ

【 摘 要 】

The Monte Carlo simulations of charged particle transport are used toinvestigate the effects of exposing ultra-thin layers of insulators (commonlyused in integrated circuits) to beams of protons, alpha particles and heavyions. Materials considered include silicon dioxide, aluminum nitride,alumina, and polycarbonate - lexan. The parameters that have been varied insimulations include the energy of incident charged particles and insulatinglayer thickness. Materials are compared according to both ionizing andnon-ionizing effects produced by the passage of radiation. [ProjekatMinistarstva nauke Republike Srbije, br. 171007]

【 授权许可】

Unknown