Femtosecond Laser Micromachining of Soda–Lime Glass in Ambient Air and under Various Aqueous Solutions

Micromachines

Romualdas Sirutkaitis¹  Julius Skruibis²  Lina Mačernytė²  Virgilijus Vaičaitis²  Ona Balachninaitė² 

[1] Institute of Biochemistry, Vilnius University, Mokslininku str. 12A, 08662 Vilnius, Lithuania;Laser Research Center, Vilnius University, Saulėtekio ave 10, 10223 Vilnius, Lithuania;

关键词: femtosecond laser micromachining;    soda–lime glass;    KOH solution;    ultrashort pulses;   

DOI  :  10.3390/mi10060354

来源: DOAJ

【 摘 要 】

We have studied femtosecond ablation of soda−lime glass sample under thin water film, under KOH and NaCl aqueous solutions films and their influence and benefits compared with ablation in the air atmosphere. These have been studied in case of the groove ablation using the infrared (IR) femtosecond laser. KOH aqueous solution film above the glass sample improved the ablation efficiency and led to the formation of the grooves with a higher aspect ratio when multi-scan glass cutting conditions were applied.

【 授权许可】

Unknown