Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge

Membranes

Alexey Nikonov¹  Alexander Kamenetskikh¹  Petr Tretnikov¹  Nikolay Gavrilov¹  Andrey Chukin²  Leonid Sinelnikov³  Denis Butakov³  Viktor Nikolkin³ 

[1] Institute of Electrophysics of the Ural Branch of the Russian Academy of Sciences, 620016 Ekaterinburg, Russia;Institute of Physics and Technology, Ural Federal University, 620062 Ekaterinburg, Russia;Joint Stock Company “Institute of Nuclear Materials”, 624250 Zarechny, Russia;

关键词: LiPON thin films;    anodic evaporation;    low-pressure arc;    plasma diagnostic;   

DOI  :  10.3390/membranes12010040

来源: DOAJ

【 摘 要 】

Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate Li₃PO₄ in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes having an anode potential provided independent control of the evaporation rate of Li₃PO₄ and the density of nitrogen plasma. Stabilization of the evaporation rate was achieved using a crucible with multi-aperture cover having floating potential. The existence of a threshold value of discharge current (40 A) has been established, which, upon reaching ionic conductivity over 10⁻⁸ S/cm, appears in the films. Probe diagnostics of discharge plasma were carried out. It has been shown that heating the films during deposition by plasma radiation to a temperature of 200 °C is not an impediment to achieving high ionic conductivity of the films. Dense uniform films of LiPON thickness 1 μm with ionic conductivity up to 1 × 10⁻⁶ S/cm at a deposition rate of 4 nm/min are obtained.

【 授权许可】

Unknown