A Gas Sensing Channel Composited with Pristine and Oxygen Plasma-Treated Graphene

Sensors

Xiaoli Wang¹  Xiangrui Bu¹  Guohe Zhang¹  Weihua Liu¹  Haiyang Wu¹  Xin Li¹  Guangbing Chen²  Minming Deng² 

[1] School of Microelectronics, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China;Science and Technology on Analog Integrated Circuit Laboratory, Chongqing 401332, China;

关键词: graphene;    oxygen plasma treatment;    gas sensor;    NH₃;   

DOI  :  10.3390/s19030625

来源: DOAJ

【 摘 要 】

Oxygen plasma treatment has been reported as an effective way of improving the response of graphene gas sensors. In this work, a gas sensor based on a composite graphene channel with a layer of pristine graphene (G) at the bottom and an oxygen plasma-treated graphene (OP-G) as a covering layer was reported. The OP-G on top provided oxygen functional groups and serves as the gas molecule grippers, while the as-grown graphene beneath serves as a fast carrier transport path. Thus, the composite channel (OP-G/G) demonstrated significantly improved response in NH₃ gas sensing tests compared with the pristine G channel. Moreover, the OP-G/G channel showed faster response and recovering process than the OP-G channel. Since this kind of composite channel is fabricated from chemical vapor deposited graphene and patterned with standard photolithography, the device dimension was much smaller than a gas sensor fabricated from reduced graphene oxide and it is favorable for the integration of a large number of sensing units.

【 授权许可】

Unknown