Miniature Capacitance Diaphragm Vacuum Sensor

Sensors & Transducers

Sun Wenjun¹  Dong Meng¹  Feng Yan¹  Ma Ben¹  Zhang Ruifang¹ 

[1] Lanzhou Institute of Physics, Lanzhou 730000, China;

关键词: Miniature capacitance diaphragm vacuum sensor;    Linearity;    Stability;    Repeatability;    Experimental research.;   

DOI  :  

来源: DOAJ

【 摘 要 】

Commercial capacitance diaphragm vacuum sensor cannot be satisfied of the requirement for vacuum measurement in deep space exploration; the miniature capacitance diaphragm vacuum sensor has been designed. The linearity, stability and repeatability of miniature capacitance diaphragm vacuum sensor have been studied on the static expansion vacuum standard. The results show that the metrological characteristic of the miniature capacitance diaphragm vacuum sensor can meet the deep space exploration needs.

【 授权许可】

Unknown