A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone

IEEE Access

Guojun Zhang¹  Jinlong Song¹  Lansheng Zhang¹  Renxin Wang¹  Wendong Zhang¹  Zhenzhen Shang¹ 

[1] Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China;

关键词: Monolithic integration;    bio-inspired;    three-dimensional;    MEMS;    vector hydrophone;   

DOI  :  10.1109/ACCESS.2019.2924990

来源: DOAJ

【 摘 要 】

Three-dimensional vector hydrophone plays an important role in underwater spatial location. In order to solve the problems of monolithic integration and linearity of previous three-dimensional vector hydrophones, a three-dimensional micro-electro-mechanical system (MEMS) vector hydrophone based on the piezoresistive effect and bio-inspired principle is proposed in this paper. Different from previous three-dimensional vector hydrophone, this three-dimensional MEMS vector hydrophone is monolithically integrated. It has the characteristics of high consistency and batch production. Acoustic pressure gradients in xand y-directions are detected by the cilium, and acoustic pressure gradient in the z direction is detected by the supporting block and beams. Mathematical models of longitudinal stress on the surface of beams and the first three-order natural frequencies of the hydrophone are established. The simulation results prove the accuracy of the mathematical models. Specific structure parameters of hydrophone are determined and then the designed hydrophone is fabricated on a silicon-on-insulator (SOI) wafer. Finally, the sensitivities and directivities of designed hydrophone are tested. The sensitivities of X-channel and Z-channel are -187 dB and -163 dB (0 dB referring to 1 VμPa^-1) at 400 Hz, respectively. The test results show that the hydrophone promising in spatial location.

【 授权许可】

Unknown