Gas pressure measurement using micro-corona-discharging effect in surface acoustic wave resonators

Results in Physics

Mingpo Li¹  Zhiwei Li¹  Yuanjie Wan²  Haisheng San²  Baofa Hu² 

[1] Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China;Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China;

关键词: Surface acoustic wave resonator;    ST-Cut quartz;    Micro-corona-discharging;    Gas pressure sensor;   

DOI  :  

来源: DOAJ

【 摘 要 】

This paper reports a gas pressure sensor using surface acoustic wave resonator (SAWR) based on both the field-induced electron emission and the micro-corona-discharging (MCD) phenomena. With the micron-scale finger-gap of electrodes covered with SiO2 passivation layer, the enhanced field-effect emission (FEE) at electrodes result in the micro-corona-discharging and thus the change in the dynamic resistance of SAWR. A high Q-factor SAWR was fabricated on ST-cut quartz substrate using microelectronics processing technology, and the gas-pressure-dependent return-loss was tested, and the MCD theory and the equivalent circuit model of SAWR were used to analyze the test results. Under argon pressure range from 0 to 601 kPa, the dynamic resistance of the SAWR varies from 24.569 to 41.589 Ω at 25 °C. The resistance rate reaches 69.3%, which is far higher than that of traditional piezoresistive pressure sensors. At the same time, the oxygen pressure was also tested by the SAWR as a comparison. The SAW-based gas pressure sensors have the potential for measurement of the super-high pressure.

【 授权许可】

Unknown