期刊论文详细信息
Tehnologìčnij Audit ta Rezervi Virobnictva | |
Influence of impurities and conditions of growing the silicon single crystals by Czochralski method on the value of lifetime of non-equilibrium charge carriers | |
Роман Николаевич Воляр1  | |
[1] Zaporozhye State Engineering Academy, 69006, Zaporizhia, Lenina ave., 226; | |
关键词: silicon; single crystal semiconductor; cultivation; Czochralski method; impurity; cooling rate; | |
DOI : 10.15587/2312-8372.2015.38119 | |
来源: DOAJ |
【 授权许可】
Unknown