Improved Noise Performance of CMOS Poly Gate Single-Photon Avalanche Diodes

IEEE Photonics Journal

Ryan Scott¹  Wei Jiang²  M. Jamal Deen³ 

[1] Department of Electrical and Computer Engineering, McMaster University, Hamilton, ON, Canada;School of Biomedical Engineering, McMaster University, Hamilton, ON, Canada;School of Biomedical EngineeringDepartment of Electrical and Computer Engineering, McMaster University, Hamilton, ON, Canada;

关键词: Single photon avalanche diode (SPAD);    guard ring;    poly gate;    dark count rate (DCR);    afterpulsing (AP);   

DOI  :  10.1109/JPHOT.2021.3128055

来源: DOAJ

【 摘 要 】

The noise performance of three types of n⁺/p-well single-photon avalanche diodes (SPADs) fabricated in a standard 180 nm CMOS technology is studied. The SPADs had different poly gate configurations: no poly gate (SPAD_NG), a dummy floating poly gate (SPAD_DG), and a field poly gate connected to the n⁺ cathode (SPAD_FG). The measurement results of dark count rate and afterpulsing showed that the SPAD_DG had better noise performance compared to the SPAD_NG. This is because the dummy poly gate pushed the shallow trench isolation away from the active region of the SPAD, thus reducing the dark noise generated from the Si-SiO₂ interface. The measurement results also revealed that the noise performance can be further improved by connecting the poly gate to the n⁺ cathode. The voltage on the poly gate in SPAD_FG reduced the electric field in the n-well guard ring (GR) region, thus reducing the carriers from the GR region that can enter the active region of SPADs and initiate dark counts.

【 授权许可】

Unknown