Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements

Sensors

Ming Zhang¹  Xin Li¹  Leijie Wang¹  Yu Zhu¹  Weinan Ye¹  Jinchun Hu¹  Rong Cheng¹ 

[1] State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China;

关键词: grating interferometer;    wide-range;    displacement measurement;    six degree-of-freedom;   

DOI  :  10.3390/s22103738

来源: DOAJ

【 摘 要 】

Grating interferometers that use large two-dimensional grating splice modules for performing wide-range measurements have significant advantages for identifying the position of the wafer stage. However, the manufacturing process of large two-dimensional grating splice modules is very difficult. In contrast to existing redundant designs in the grating line dimension, we propose a novel interferometric reading head with a redundant design for obtaining wide-range displacement measurements. This interferometric reading head uses a one-dimensional grating splice module, and it was observed to be compatible with two orthogonal gratings. We designed a grating interferometer system composed of four reading heads to achieve a wide range of measurements and verified it using ZEMAX simulation. By conducting experiments, we were able to verify the compatibility of the reading head with gratings possessing different grating line directions; the measurement noise was found to be less than 0.3 nm.

【 授权许可】

Unknown