Design and Simulation of Double-spiral Shape Micro-heater for Gas Sensing Applications

Sensors & Transducers

Mahanth PRASAD¹  V. K. KHANNA¹  V. SAHULA²  R. P. YADAV³ 

[1] MEMS & Microsensors Group, Central Electronics Engineering Research Institute (CEERI)/Council of Scientific & Industrial Research (CSIR), Pilani – 333031 (Rajasthan), India;Malaviya National Institute of Technology, Jaipur, India;Rajasthan Technical University, Kota, India;

关键词: Pt-heater;    Bulk-micromachining;    Microhotplate;    Gas sensor;    ANSYS simulation;   

DOI  :  

来源: DOAJ

【 摘 要 】

The paper presents the design and simulation of double spiral shape micro-heater using ANSYS 10.0 and MATLAB, which requires 12.5 mW-78.3 mW powers to create the temperature 181 °C-1002 °C for gas sensing applications. The results obtained from ANSYS simulation were verified using MATLAB Tool. A platinum-based bulk micro-machined hotplate of size 500 mm × 500 mm has been designed for fabrication as a multi-layer structure on a silicon substrate with thermal silicon dioxide as the supporting membrane, followed by LPCVD (Low pressure chemical vapor deposition) silicon nitride film. Gas sensing film (SnO2) will be deposited on the interdigitated Pt electrodes formed on the PECVD oxide layer. The temperature uniformity of microhotplate (as it is essential for better sensing mechanism) based on double spiral heater has been reported in this paper. To estimate the resistance of the Pt heater, a 2000 Aº thick platinum film has been deposited by sputtering on silicon and its sheet resistance has been measured as 2.5 Ohm/□. We have used this value to calculate the resistance of Pt resistor, which was found 319 Ohm.

【 授权许可】

Unknown