Looking Inside Micro- and Nano-Mechanical Pillar Resonators: A Picosecond Ultrasonics Approach

Proceedings

Eva Weig¹  Juliane Doster¹  Paul Stritt¹  Thomas Dekorsy²  Vitalyi Gusev³  Mike Hettich⁴ 

[1] Department of Physics, University of Konstanz, D-78457 Konstanz, Germany;Institute for Technical Physics, German Aerospace Center (DLR), D-70569 Stuttgart, Germany;LAUM, UMR-CNRS 6613, Le Mans Université, Avenue O. Messiaen, 72085 Le Mans, France;Research Center for Non-Destructive Testing (RECENDT), 4040 Linz, Austria;

关键词: nanomechanics;    elasticity;    picosecond ultrasonics;    nanoanalytics;   

DOI  :  10.3390/proceedings2020056031

来源: DOAJ

【 摘 要 】

Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions.

【 授权许可】

Unknown