Polycarbonate Masters for Soft Lithography

Micromachines

Jian Zhou¹  Hua Gao¹  Prithviraj Mukherjee¹  Ian Papautsky¹  Filippo Amadeo¹ 

[1] Department of Biomedical Engineering, University of Illinois at Chicago, Chicago, IL 60607, USA;

关键词: soft lithography;    replica molding;    polycarbonate;    polymer masters;    microfluidics;   

DOI  :  10.3390/mi12111392

来源: DOAJ

【 摘 要 】

Fabrication of microfluidic devices by soft lithography is by far the most popular approach due to its simplicity and low cost. The approach relies on casting of elastomers, such as polydimethylsiloxane (PDMS), on masters fabricated from photoresists on silicon substrates. These masters, however, can be expensive, complicated to fabricate, and fragile. Here we describe an optimized replica molding approach to preserve the original masters by heat molding of polycarbonate (PC) sheets on PDMS molds. The process is faster and simpler than previously reported methods and does not result in a loss of resolution or aspect ratio for the features. The generated PC masters were used to successfully replicate a wide range of microfluidic devices, including rectangular channels with aspect ratios from 0.025 to 7.3, large area spiral channels, and micropost arrays with 5 µm spacing. Moreover, fabrication of rounded features, such as semi-spherical microwells, was possible and easy. Quantitative analysis of the replicated features showed variability of <2%. The approach is low cost, does not require cleanroom setting or hazardous chemicals, and is rapid and simple. The fabricated masters are rigid and survive numerous replication cycles. Moreover, damaged or missing masters can be easily replaced by reproduction from previously cast PDMS replicas. All of these advantages make the PC masters highly desirable for long-term preservation of soft lithography masters for microfluidic devices.

【 授权许可】

Unknown